Magnetic Field Cancelling System MR-3
3-axis magnetic field cancelling system for electron microscopes (SEM and TEM), electron and ion beam experiments, nanotechnology, biomagnetic investigations, etc. High reliability through rugged analog design. No tedious programming, no chrashs. More than 1600 MR-3 systems sold worldwide.
The magnetic field is measured with a low-noise 3-axis fluxgate sensor. The controller unit contains the sensor and control electronics and power amplifiers for the direct connection of compensation coils. Quasi-static DC magnetic field changes caused by trams, subway, trucks, and elevators are effectively reduced as well as AC magnetic field from power lines.
(Aluminum frame with integrated compensation coils for SEM)
Suitable compensation coils can be easily made from cable loops which are installed to the walls of the laboratory. We also offer complete systems with compensation coils installed to the walls or integrated in a self-supporting aluminum frame.
- 3-axis magnetic field cancelling
- Frequency range DC to 1 kHz (version FAST MR-3 up to 10 kHz)
- Fluxgate magnetic field sensor with sub-nanotesla resolution
- Simultaneous cancelling of quasi-static (DC) and AC magnetic field
- Typ. 40 dB field reduction at 50/60 Hz
- Typ. 20 dB field reduction at 250/300 Hz
- Magnetic field displays and alarm function
(SEM image improvement)
Comparison Table
| MR-3 | FAST MR-3 | TWIN MR-3 | FAST TWIN MR-3 | |
| Applications | Standard system for REM | Standard system for wafer fabs | System for TEM and high-end applications | System for TEM in wafer fabs and high-end applications |
| Specifications | ||||
| Number of Triaxial sensor | 1 | 2 | 2 | 3 |
| Bandwidth (AC+DC) | DC bis 1kHz | DC bis 10kHz | DC bis 1kHz | DC bis 10kHz |
| Mixer electronics module for better attenuation (Virtual Sensor to the Electron/Ion beam) | No | No | Yes | Yes |
| Noise | ||||
| 0,1 to 1 kHz | < 0,3 nT RMS | < 0,3 nT RMS | < 0,2 nT RMS | < 0,2 nT RMS |
| 0,1 to 10 kHz | < 0,6 nT RMS | < 0,5 nT RMS | ||
| Field attenuation factors | ||||
| Near DC (DC incremental to 10 Hz)* | 500 | 1000 | 500 | 1000 |
| AC field at 50 Hz* | 100 | 1000 | 100 | 1000 |
| AC field at 250 Hz* | 0 | 600 | 10 | 600 |
| AC Feld at 9 kHz* | 20 | 20 |
*) Typically
Download data sheets here: 
Data sheet MR-3 Data sheet FAST MR-3 Data sheet TWIN MR-3
